Date of Award


Degree Name

Master of Arts



First Advisor

Dr. Asghar Kayani

Access Setting

Masters Thesis-Campus Only


The effect of hydrogenation on the final concentration of trapped elements and their thermal stability with respect to hydrogen content in Diamond like carbon films is studied using ion beam analysis (IBA) techniques. The elemental concentrations of the films were measured in samples deposited on silicon substrates with a 3.3 MeV of He++ beam used to perform Rutherford Backscattering Spectroscopy (RBS), Non-Rutherford backscattering Spectroscopy (NRBS) and Elastic Recoil Detection Analysis (ERDA). Thermal stability with respect to trapped hydrogen in the films has been studied. As the films were heated in-situ in the vacuum using a non-gassy button heater, hydrogen was found to be decreasing around 350 degrees Celcius.