Date of Award


Degree Name

Master of Science in Engineering


Electrical and Computer Engineering

First Advisor

Dr. Massood Z. Atashbar

Second Advisor

Dr. Bradley J. Bazuin

Third Advisor

Dr. Binu B. Narakathu


Flexible Hybrid Electronics (FHE), pressure sensors, energy harvesters, wearable healthcare monitoring, nanogenerators

Access Setting

Masters Thesis-Open Access


This work focuses on the design, fabrication and characterization of novel flexible capacitive pressure sensors and triboelectric energy harvesters using laser-assisted patterning process for flexible hybrid electronic applications. Initially, the capacitive pressure sensor was developed by fabricating a set of polydimethylsiloxanes (PDMS) dielectric films with pyramid shaped micro-structures using a laser-assisted patterning process. The pressure sensor consists of two electrodes (top and bottom) that were fabricated by depositing silver (Ag) on flexible polyethylene terephthalate (PET) using additive screen-printing process. Finally, the pressure sensor was assembled by attaching the top and bottom Ag electrodes to the smooth side of pyramid shaped micro-structured PDMS dielectric layers. The capability of the fabricated pressure sensor was investigated by subjecting the sensor to pressures ranging from 0 to 10 kPa. In addition, the stability of the fabricated pressure sensor towards the applied pressure, response and recovery time of the pressure sensor, as well as the hysteresis of the fabricated pressure sensor was also studied.

Then, a flexible vertical contact-separation mode based triboelectric nanogenerator (TENG) was fabricated using laser-assisted patterning and additive screen-printing processes. A micro-pyramid patterned polydimethyl siloxane (MP-PDMS) was prepared by using a laser engraved acrylic mold. A top and bottom electrode for TENG was fabricated by screen printing silver (Ag) on a flexible polyimide substrate. The MP-PDMS, was bonded to the bottom electrode using a thin layer of adhesive PDMS. The MP-PDMS and the printed polyimide electrodes were employed as positive and negative triboelectric layers, respectively to scavenge mechanical energy into electrical energy. The performance of the MP-TENG was demonstrated by investigating the open-circuit voltage, short-circuit current and instantaneous power on the load resistor